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Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

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  11. Appendix Table I-16 to Subpart I of Part 98
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Displayed edition2026-04-15
Last updated2026-04-15

Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

Manufacturing type/process type/gasDefault DRE

(%)
MEMS, LCDs, and PV Manufacturing60
Semiconductor Manufacturing:
CF487
CH3 F98
CHF397
CH2 F298
C4 F893
C4 F8 O93
C5 F897
C4 F695
C3 F898
C2 HF597
C2 F698
SF695
NF396
All other carbon-based fluorinated GHGs used in Semiconductor Manufacturing60
N2 O Processes
CVD and all other N2 O-using processes60

[89 FR 31922, Apr. 25, 2024]