Table I-17 to Subpart I of Part 98—Expected and Possible By-Products for Electronics Manufacturing
| For each stack system for which you use the “stack test method” to calculate annual emissions, you must measure the following: | If emissions are detected intermittently, use the following procedures: | If emissions are not detected, use the following procedures: |
|---|---|---|
| Expected By-products: CF4 C2 F6 CHF3 CH2 F2 CH3 F | Use the measured concentration for “Xksm” in Equation I-18 when available and use one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “Xksm” when the fluorinated GHG is not detected | Use one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “Xksm” in Equation I-18. |
| Possible By-products: C3 F8 C4 F6 c-C4 F8 C5 F8 | Use the measured concentration for “Xksm” in Equation I-18 when available and use one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “Xksm” when the fluorinated GHG is not detected | Assume zero emissions for that fluorinated GHG for the tested stack system. |
[78 FR 68234, Nov. 13, 2013]