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Table I-15 to Subpart I of Part 98—Default Emission Factors (1-U<sub>ij</sub>) for Gas Utilization Rates (U<sub>ij</sub>) and By-Product Formation Rates (B<sub>ijk</sub>) for MEMS Manufacturing for Use With the Stack Test Method

Default Emission Factors (1-U<sub>ij</sub>) for Gas Utilization Rates (U<sub>ij</sub>) and By-Product Formation Rates (B<sub>ijk</sub>) for MEMS Manufacturing for Use With the Stack Test Method

  1. CFR
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  3. Title 40
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  5. Chapter I
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  7. Part 98
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  9. Subpart I
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  11. Appendix Table I-15 to Subpart I of Part 98
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Displayed edition2026-04-15
Last updated2026-04-15

Table I-15 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for MEMS Manufacturing for Use With the Stack Test Method

[78 FR 68233, Nov. 13, 2013]