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Table I-21 to Subpart I of Part 98—Examples of Fluorinated GHGs Used by the Electronics Industry

Examples of Fluorinated GHGs Used by the Electronics Industry

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  5. Chapter I
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  9. Subpart I
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  11. Appendix Table I-21 to Subpart I of Part 98
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Displayed edition2026-04-15
Last updated2026-04-15

Table I-21 to Subpart I of Part 98—Examples of Fluorinated GHGs Used by the Electronics Industry

Table I-21 to Subpart I of Part 98—Examples of Fluorinated GHGs Used by the Electronics Industry

Product type Fluorinated GHGs used during manufacture
ElectronicsCF4, C2 F6, C3 F8, c-C4 F8, c-C4 F8 O, C4 F6, C5 F8, CHF3, CH2 F2, NF3, SF6, and fluorinated HTFs (CF3-(O-CF(CF3)-CF2)n-(O-CF2)m-O-CF3, Cn F2n+2, Cn F2n+1 (O)Cm F2m+1, Cn F2n O, (Cn F2n+1)3N).

[89 FR 31924, Apr. 25, 2024.]