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Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination

Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination

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  3. Title 40
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  5. Chapter I
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  7. Part 98
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  9. Subpart I
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  11. Appendix Table I-1 to Subpart I of Part 98
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Displayed edition2026-04-15
Last updated2026-04-15

Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination

Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination

Product typeEmission factors EFi
CF4C2 F6CHF3c-C4 F8C3 F8NF3SF6N2 O
Semiconductors (kg/m2)0.91.00.04NA0.050.040.20NA
LCD (g/m2)0.65NA0.00240.00NA1.294.1417.06
MEMS (kg/m2)0.015NANA0.076NANA1.86NA
Notes: NA denotes not applicable based on currently available information.

[89 FR 31919, Apr. 25, 2024]